ABSTRACT

Submicron CMOS process technology has enabled the implementation of low-power, low-noise, low-cost microelectronics on a silicon chip. Using these features, biomedical very large-scale integration (VLSI) circuits have been designed and fabricated, along with the use of microelectromechanical systems (MEMs) and nanoelectromechanical systems (NEMSs) within biomedical devices. Many of the applications for these devices require sensing very weak biosignals. For instance, integrated preamplifiers, along with a microelectrode array, are employed to amplify very small biopotential signals such as EEG, ECG, and EMG [1-2]. Recently, on-chip preamplifiers have been used to sense the small current variations that are generated when individual DNA molecules pass through a nanopore sensor.