ABSTRACT

Currently, there are a large number of reviews and specialized papers devoted to the analysis of different aspects of porous silicon formation, including discussion of the mechanisms of silicon porosification (Smith and Collins 1992; Lehmann 1993; Halimaoui 1995, 1997). However, in reality, we have a situation where most studies are focused on the decision of particular technical tasks, and most review papers are focused on the analysis of too general problems. As a result, articles do not contain the proper generalization of the results related to silicon porosification, and do not give practical advices for working with porous materials. Therefore, the present chapter is focused on the discussion of exactly practical aspects of the technology of silicon porosification.