ABSTRACT

A b s tra c t. Wideband HBTs are obtained by thinning the base and collector, increasing current density, decreasing emitter contact resistivity, and reduc­ ing the emitter and collector junction widths. In digital ICs, increased emit­ ter current density and reduced emitter resistivity are critical requirements. We have fabricated submicron HBTs using substrate transfer processes, and have obtained devices with extremely high mm-wave gains. Amplifiers with 6.3 dB gain at 175 GHz have been fabricated, and 75 GHz true static fre­ quency dividers demonstrated.