ABSTRACT
The Mn-content as measured by SIMS is 7.6 and 13.7% for sample A and B, respectively, and is constant over the entire depth ruling out any accumulation of Mn on the surface during growth. XRD of samples with various Mn-content reveals a linear decrease of the c lattice constant with increasing Mn-content, indicating a substitutional incorporation of Mn. The x-ray rocking curve width in these samples is typically 300", similar to the values we observe for equally thin pure GaN layers grown under these
