ABSTRACT
The inorganic electroluminescent (EL) display structure of Drestiau type [1] with an organosilicon protecting layer has been prepared for the first time (Fig. 1). Hybrid technology was used. The structure emits in the yellow /red spectral region. The polymer layer of high cross-linking and branched structure and thickness < 1 pm [2] protects the structure against electrical breakdown. It was synthesized from hexamethyldisiloxane monomer in capacitively coupled glow discharge (3.0 mA/cm2, 113 Pa pressure of gaseous monomer phase) and deposited on the heterogeneous matrix of the emitting layer. Plasma polymerization is known as a modern and prospective method: the deposited layer is mechanically-then-nally-chemically proof and possesses a good adhesiveness related to various substrates [2].
