ABSTRACT
Excimer sources of incoherent VUV and UV radiation (excimer lamps) excited by volume dielectric barrier discharge (DBD) at near atmospheric pressures in the last decade is broadly used in different areas, such as UV-induced metal deposition, dielectric thin film deposition, oxidation of silicon, surface modification, pollution control [I, 2]. Excimer lamps of planar geometry are of interest for obtaining of a homogeneous flat radiation flux. In this work the experimental studies of the UV excimer lamp operated in Kr/Xe/Cl2 gas mixtures at total pressure within the limits of 0.1 - 1 bar with planar geometry of electrodes excited by surface barrier discharge (SBD) have been carried out.
