ABSTRACT

Electron energy loss spectroscopy and imaging have had a major impact on electron microscopy since the construction of the first electron spectrometers and the achievement of the first energy filtered images. The atom content in the specimen has been analyzed directly via the energy distribution in the electron beam, beginning over 50 years ago with the electron spectrometer built by Hillier and Baker [1], based on earlier designs of velocity analyzing ion mass spectrometers [2], to the currently available commercial systems such as the Gatan PEELS.