ABSTRACT
This chapter reviews the theoretical models available to describe particle trans port in typical semiconductor processing environments. Recent or classic refer ences have been provided wherever possible for additional background. In all of the discussion that follows, particle concentrations are assumed to be low enough so that the influence of the particle on fluid transport can be neglected; particle-particle interactions are also neglected. Under this assumption, the fluid and thermal fields are calculated first (in the absence of particles), and then used as input for subsequent particle transport calculations. The theoretical underpin nings for both the Lagrangian approach (where individual particle trajectories are calculated) and the Eulerian approach (where the particle concentration field is modeled as a continuum) are presented. The strength of the Lagrangian formu lation is in predicting particle transport resulting from external forces including particle inertia; but the current implementation cannot describe the chaotic effect of particle Brownian motion (i.e., particle diffusion) on particle transport. On the other hand, the Eulerian formulation can describe particle transport resulting from applied forces and particle diffusion, but the current implementation cannot account for particle inertia.
