ABSTRACT
This chapter dscribes a top-down Monte Carlo modeling approach
to self-organized pattern formation by ion beam erosion. After a
discussion of the general topic and its present status, we briefly
introduce two of the more microscopic theories — the binary
collision approximation (BCA) molecular dynamics and kinetic
transport theory — to highlight some results, which should be
taken into account when constructing Monte Carlo models. Then we
describe a basic simulation model in detail and very briefly discuss
its range of applications. The basic model ignores several of the
results from the more detailed theories. We show that it is very easy
to include the disregarded findings and exemplify the impact of the
refinements and extensions on ion-induced pattern formation.
