ABSTRACT

Applications of full-field optical coherence tomography (FF-OCT)

outside the biomedical field are the topic of this chapter. Since its

introduction and based on the original motivation of the underlying

white-light interferometry technique in microelectronic inspection

tasks, FF-OCT is continuously gaining impetus for the characteriza-

tion of materials and for the evaluation of technical structures in

a nondestructive way. Examples, from the measurement of surface

topography and of layer thicknesses to a full three-dimensional

evaluation of internal structures within scattering media, are given

together with novel and advanced concepts for functional imaging.