ABSTRACT

This is the first book to provide an in-depth presentation of photosensitive polyimides for electronic and photonic applications. The authors are leading specialists in this field from Japan, Europe and the U.S.
From the Preface
Aromatic polyimides were developed originally as thermostable flexible polymer films for space applications. Now polyimides have found widespread use in the manufacture of electronic devices and have been employed in increasingly diverse areas of electronics and information technology. In addition to their excellent thermal stability and high processability, a wide range of chemical and physical properties provided by molecular engineering makes polyimides highly versatile in the electronics and information industries.
Lithography of polyimides is an inevitable process in using polyimides for microelectronic fields, and hence increasing research has been devoted to developing photosensitive polyimides, which make it unnecessary to use photoresists for patterning polyimides and diminishing markedly the number of steps in fabrication of various electronic devices.
In addition, the development of technology of photosensitive polyimides is expected to play a great role in manufacturing photonic devices in the near future, when the design and control of hyper fine structures . . . including higher thermal stability and better processability would be essential.

chapter 1|11 pages

Introduction to Photopolymers and Microelectronics

ByKazuyuki Horie

chapter 2|36 pages

Applications of Polyimides in Electronics

ByHellmut Ahne, Roland Rubner

chapter 4|24 pages

Electronic Configuration of Polyimides and Their Photophysical Processes

ByMasatoshi Hasegawa

chapter 5|32 pages

Design of Photosensitive Polyimide Precursor Systems

ByMasaya Asano, Hiroo Hiramoto

chapter 6|23 pages

Intrinsically Photosensitive Polyimides

ByTakashi Yamashita

chapter 7|35 pages

Photosensitive Polyimides Based on Chemical Amplification Mechanism

ByTsuguo Yamaoka, Toshihiko Omote

chapter 8|17 pages

Electron Beam Lithography of Polyimides

ByTakashi Yamashita

chapter 9|56 pages

Processing of Polyimides and Related Topics

ByFumio Kataoka, Hiroshi Suzuki

chapter 10|37 pages

Applications of Polyimides to Photonic Devices

BySusan Ermer