Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts.

Supplying effective tools for increased quality and reliability, this book

  • Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems
  • Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques
  • Offers numerous practical examples and illustrations
  • Includes calibration of optical measurement systems for the inspection of MEMS
  • Presents the characterization of dynamics of MEMS

chapter 1|50 pages

Image Processing and Computer Vision for MEMS Testing

ByMarkus Hüttel

chapter 2|21 pages

Surface Features

ByXiangqian Jiang

chapter 3|19 pages

A Metrological Characteristics Approach to Uncertainty in Surface Metrology

ByRichard Leach, Han Haitjema, Claudiu Giusca

chapter 4|46 pages

Image Correlation Techniques for Microsystems Inspection

ByDietmar Vogel, Bernd Michel

chapter 5|15 pages

Light Scattering Techniques for the Inspection of Microcomponents and Structures

ByAngela Duparré, Sven Schröder

chapter 6|22 pages

Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM)

ByF. Michael Serry, Joanna Schmit

chapter 7|30 pages

Optical Profiling Techniques for MEMS Measurement

ByKlaus Körner, Johann Krauter, Aiko Ruprecht, Tobias Wiesendanger

chapter 8|37 pages

Grid and Moiré Methods for Micromeasurements

ByAnand Asundi, Bing Zhao, Huimin Xie

chapter 9|15 pages

Grating (Moiré) Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents

ByLeszek Salbut, Malgorzata Kujawinska

chapter 10|35 pages

Interference Microscopy Techniques for Microsystem Characterization

ByAlain Bosseboeuf, Philippe Coste, Sylvain Petitgrand

chapter 11|51 pages

Measuring MEMS in Motion by Laser Doppler Vibrometry

ByChristian Rembe, Georg Siegmund, Heinrich Steger, Michael Wörtge

chapter 12|30 pages

An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS

ByChristophe Gorecki, Michał Józwik, Patrick Delobelle

chapter 13|26 pages

Optoelectronic Holography for Testing Electronic Packaging and MEMS

ByCosme Furlong

chapter 14|80 pages

Digital Holography and Its Application in MEMS/MOEMS Inspection

ByWolfgang Osten, Pietro Ferraro

chapter 15|31 pages

Speckle Metrology for Microsystem Inspection

ByRoland Höfling, Petra Aswendt

chapter 16|23 pages

Spectroscopic Techniques for MEMS Inspection

ByIngrid De Wolf

chapter 17|21 pages

Sensor Fusion in Multiscale Inspection Systems

ByMarc Gronle