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Plasma Deposited Thin Films
DOI link for Plasma Deposited Thin Films
Plasma Deposited Thin Films book
Plasma Deposited Thin Films
DOI link for Plasma Deposited Thin Films
Plasma Deposited Thin Films book
Edited ByJ. Mort, F. Jansen
Edition 1st Edition
First Published 1986
eBook Published 22 December 2017
Pub. Location Boca Raton
Imprint CRC Press
Pages 253
eBook ISBN 9781351075817
Subjects Physical Sciences
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Mort, J., & Jansen, F. (Eds.). (1986). Plasma Deposited Thin Films (1st ed.). CRC Press. https://doi.org/10.1201/9781351075817
ABSTRACT
In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.
TABLE OF CONTENTS
chapter 2|23 pages
Plasma-Deposited Films: Kinetics of Formation, Composition, and Microstructure
ByMasataka Hirose
chapter 7|18 pages
Xerographic Applications of Plasma-Deposited Amorphous Tetrahedral Materials
ByJ. Mort, F. Jansen
chapter 8|31 pages
Hydrogenated Amorphous Silicon Electronic Devices and their Arrays
ByMasakiyo Matsumura
