While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and

part |2 pages

Part I: Standard Lithography

chapter 1|6 pages

Introduction to Nanofabrication

ByStefano Cabrini, Aditi Risbud

chapter 2|32 pages

Electron Beam Lithography

ByStephen Thoms

chapter 3|44 pages

Nanofabrication with Focused Ion Beams

ByJacques Gierak, Ralf Jede, Peter Hawkes

chapter 4|26 pages

Focused Ion Beam and Electron Beam Deposition

ByShinji Matsui

chapter 5|16 pages

Plasma-Assisted Pattern Transfer at the Nanoscale

BySteven Shannon

chapter 7|24 pages

Soft X-Ray Lithography

ByHerbert O. Moser, Linke Jian

chapter 8|20 pages

Simulations in Micro- and Nanofabrication

BySergey Babin

part |2 pages

Part II: New Lithographic Techniques

chapter 9|20 pages

Nanoimprint Lithography

ByStephen Y. Chou

chapter 10|22 pages

Scanning Probe Lithography

ByOmkar A. Nafday

chapter 11|22 pages

Two-Photon Lithography

BySatoru Shoji, Satoshi Kawata

chapter 13|16 pages

Directed Self-Assembly

ByGordon S. W. Craig, Paul F. Nealey

chapter 14|30 pages

Self-Assembled DNA Nanostructures and DNA Devices

ByJohn H. Reif, Harish Chandran, Nikhil Gopalkrishnan, and Thomas LaBean

chapter 15|22 pages

New Emerging Techniques

ByThomas Schenkel, T.-C. Shen, Yuan Wang, and Xiang Zhang

part |2 pages

Part III: Nanofabrication Applications

chapter 16|26 pages

Nanoelectromechanical Systems

ByHiroyuki Fujita, Yoshio Mita

chapter 17|20 pages

Micro- and Nanouidics

ByArata Aota, Takehiko Kitamori

chapter 18|22 pages

Fabrication of Nanophotonic Structures

ByStefano Cabrini, P. James Schuck, Alexander Weber-Bargioni, Allan Chang

chapter 19|16 pages

Patterning Magnetic Nanostructures with Ions

ByDan Kercher

chapter 20|14 pages

Plasmonic Metamaterials

ByTakuo Tanaka

chapter 21|30 pages


ByKoji Ishibashi

chapter 22|37 pages

Manipulation and Nanostructuring for Biological Applications

ByGobind Das, Carlo Liberale, Francesco De Angelis, Maria Laura Coluccio, Enzo Di Fabrizio, Patrizio Candeloro