Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena.

Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology’s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul’s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry.

Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy’s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.

chapter 1|28 pages

Moore’s Law: Technology Scaling and Reliability Challenges

ByTanya Nigam, Kok-Yong Yiang, Amit Marathe

chapter 2|32 pages

Scaling and Radiation Effects in Silicon Transistors

ByAllan H. Johnston, Leif Z. Scheick

chapter 3|18 pages

Hewlett-Packard’s MEMS Technology: Thermal Inkjet Printing and Beyond

ByJames Stasiak, Susan Richards, Paul Benning

chapter 4|29 pages

Silicon MEMS Resonators for Timing Applications

ByBongsang Kim, Matthew A. Hopcroft, Rob N. Candler

chapter 5|20 pages

Nanoscale Electromechanical Devices Enabled by Nanowire Structures

ByPhilip X.-L. Feng

chapter 6|27 pages

Silicon Etching and Etch Techniques for NEMs and MEMs

ByM. David Henry, Axel Scherer

chapter 7|21 pages

Learning from Biology: Viral-Templated Materials and Devices

ByElaine D. Haberer

chapter 8|40 pages

Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems

ByA. John Hart, Sei Jin Park, Michael F.L. de Voider, Sameh H. Tawfick, Eric R. Meshot

chapter 9|26 pages

Heterogeneous Integration of Carbon Nanotubes on Complementary Metal Oxide Semiconductor Circuitry and Sensing Applications

ByChia-Ling Chen, Sameer Sonkusale, Michelle Chen, Mehmet R. Dokmeci

chapter 11|32 pages

Carbon Nanotube Y-Junctions

ByPrabhakar R. Bandaru

chapter 12|39 pages

Nanoscale Effects in Multiphase Flows and Heat Transfer

ByNavdeep Singh, Donghyun Shin, Debjyoti Banerjee

chapter 13|38 pages

Nanoengineered Material Applications in Electronics, Biology, and Energy Harnessing

ByDaniel S. Choi, Zhikan Zhang, Naresh Pachauri