ABSTRACT

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

chapter 2|38 pages

Crystallography

chapter 4|84 pages

Silicon Single Crystal Is Still King

chapter 5|136 pages

Photonics

chapter 6|82 pages

Fluidics

chapter |1 pages

Back Cover

chapter |7 pages

Front Cover

chapter |2 pages

Contents

chapter |2 pages

Roadmap

chapter |2 pages

Author

chapter |4 pages

Acknowledgments

chapter 1|86 pages

Photolithography

chapter 3|60 pages

Dry Etching

chapter 5|32 pages

Thermal Energy-Based Removing

chapter 6|40 pages

Mechanical Energy-Based Removing

chapter 10|52 pages

Micromolding Techniques—LIGA

chapter |1 pages

Back Cover

chapter |7 pages

Front Cover

chapter |2 pages

Contents

chapter |2 pages

Roadmap

chapter |2 pages

Author

chapter |4 pages

Acknowledgments

chapter 4|54 pages

Packaging, Assembly, and Self-Assembly

chapter 6|74 pages

Metrology and MEMS/NEMS Modeling

chapter 7|28 pages

Scaling Laws

chapter 8|88 pages

Actuators

chapter 9|52 pages

Power and Brains in Miniature Devices

chapter 10|100 pages

MEMS and NEMS Applications