ABSTRACT

Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation and high-vacuum system performance. The book delineates the technical and theoretical aspects of the subject without getting in too deep. It leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high vacuum technology.

chapter 1|14 pages

Introduction

chapter 2|25 pages

Properties of Gases

chapter 3|36 pages

Fluid Flow and Pumping Concepts

chapter 4|59 pages

Vacuum Systems

chapter 5|69 pages

Coarse Vacuum Pumps

chapter 6|61 pages

Vapor Jet (Diffusion) Pumps

chapter 7|50 pages

Turbomofecular Pumps

chapter 8|33 pages

Cryogenic Pumps

chapter 9|30 pages

Gettering and Ion Pumping

chapter 10|22 pages

Overloading of Vacuum Pumps

chapter 11|25 pages

Ultrahigh Vacuum

chapter 12|40 pages

Vacuum Gauges and Gas Analyzers

chapter 13|44 pages

Leak Detection