ABSTRACT

Vacuum plays an important role in science and technology. The study of interaction of charged particles, neutrals and radiation with each other and with solid surfaces requires a vacuum environment for reliable investigations. Vacuum has contributed to major advancements made in nuclear science, space, metallurgy, electrical/electronic technology, chemical engineering, transportation, robotics and many other fields. This book is intended to assist students, scientists, technicians and engineers with understanding the basics of vacuum science and technology for application in their projects. The fundamental theories, concepts, devices, applications, and key inventions are discussed.

chapter 1|9 pages

Kinetic Theory of Gases

chapter 2|14 pages

Flow of Gas and Conductance

chapter 3|38 pages

Surface Phenomena

chapter 5|33 pages

Measurement of Pressure

chapter 6|47 pages

Vacuum Pumps

chapter 7|13 pages

System Design

chapter 8|5 pages

Vacuum Measurement Methods

chapter 10|5 pages

Leak Detection

chapter 11|8 pages

Extreme High Vacuum

chapter 12|33 pages

Applications