The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit

chapter 1|4 pages

Introduction—Surface and Nanometrology

chapter 2|166 pages


chapter 4|174 pages

4Chapter Measurement Techniques

chapter 6|136 pages

6Chapter Surfaces and Manufacture

chapter 9|6 pages

General Comments