Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications.Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines h

chapter 1|4 pages

Introduction—Surface and Nanometrology

chapter 2|166 pages


chapter 4|174 pages

4Chapter Measurement Techniques

chapter 6|136 pages

6Chapter Surfaces and Manufacture

chapter 9|6 pages

General Comments