ABSTRACT

Miniaturization methods and materials are known as microelectro-mechanical systems (MEMSs). In recent years, MEMS applications have also been extended to the optical communication and biomedical fields. The former are called micro-optic electromechanical systems, while the latter are known as biomicroelectromechanical systems (bioMEMSs). Major potential and existing bioMEMS products are biochips/sensors, drug delivery systems, advanced tissue scaffolds, and miniature bioreactors. In this entry, major bioMEMS applications and microfluidics relevant to bioMEMS applications are briefly introduced.