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Patterning: Advanced Pattern Generation and Etching Techniques
DOI link for Patterning: Advanced Pattern Generation and Etching Techniques
Patterning: Advanced Pattern Generation and Etching Techniques
BookDekker Encyclopedia of Nanoscience and Nanotechnology, Seven Volume Set
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Edition 3rd Edition
First Published 2011
Imprint CRC Press
Pages 23
eBook ISBN 9781351238175