ABSTRACT
The purpose of electron probe x-ray microanalysis is, in the strictest sense, to perform elemental analysis by measuring the x-rays excited in a microvolume under bombardment with energetic electrons, and in general to study the composition of materials at the microscopic level. X-rays are generated in electron microprobes or scanning electron microscopes. Quantitative analysis requires stable experimental conditions, including a constant electron beam energy E0, a constant electron dose, and fixed detector type and geometry. Electron probe x-ray microanalysis is a well established microanalytical technique. Two types of spectrometer can be used, namely crystal spectrometers based on Bragg reflection, called wavelength dispersive spectrometers or Silicon drifted-lithium or Ge(Li) solid state detectors called energy dispersive spectrometers. Numerical examples have been used to give a feel for the magnitudes of the large number of parameters involved in the interaction of electrons and x-rays with solids and to demonstrate the effectiveness of matrix correction methods.
