ABSTRACT
The ideal goals of an industrial enterprise are two-fold, to make money and thus to contribute to the general welfare of society. The analyst in an industrial laboratory is constantly confronted with problems from technology. Due to the strong coupling between technology, physical background and analysis, it is very important that the analyst is thoroughly familiar with all of the stages in silicon wafer processing technology. In silicon technology most of the layer deposition processes are carried out in the vapour phase, that is, the material is transported in the gas phase. Poly crystalline silicon diffusion sources are used in integrated circuit technology to make transistors. The simplest and most basic intrinsic point defects in crystals are vacancies which are unoccupied sites and self-interstitials which are additional atoms of the same species as the crystal, squeezed in between the atoms on normal lattice sites. In the vacancy diffusion mechanism substitutionally dissolved atoms require intrinsic point defects for diffusion.
