ABSTRACT
This chapter begins with a discussion of the gaseous chemistry of both the hydrogen and relevant hydrocarbon species, followed by an examination of the evidence regarding which hydrocarbon species contribute to diamond growth. It discusses the diamond growth chemistry, with relevant experimental observations, and a discussion of some aspects of the surface chemistry, followed by a review of models proposed for elements of the growth mechanisms. The complex chemical processes occurring during the chemical vapor deposition (CVD) of diamond are fascinating and exciting from many perspectives. The chapter summarizes the characteristics of the gas phase in diamond CVD reactors, and also discusses the controlling chemistry. Atomic hydrogen is perhaps the most critical determinant of diamond film quality and growth rate. The chapter concludes with a discussion of the chemistry affecting the quality of the chemical vapor deposition diamond and the incorporation of defects.
