ABSTRACT
Microelectromechanical systems (MEMS) is a rapidly emerging technology that employs batch fabrication processes similar to those of the integrated circuit industry to fabricate miniature electromechanical parts. The use of MEMS techniques to fabricate deformable mirrors for adaptive optics represents a nearly ideal match of technology and application. Optical system apertures are readily scaled to MEMS dimensions. The small motion ranges of MEMS are well suited to optical phase modulation. The conventionally manufactured deformable mirrors currently in use are large, heavy, and power hungry. Perhaps most importantly, current deformable mirrors are very expensive. Using MEMS batch fabrication techniques the cost of deformable mirrors for adaptive optics can potentially be reduced by a factor of 1000. As deformable mirror cost decreases, the number of practical applications increases. For many applications, a low-cost deformable mirror may be the enabling technology. The small size, weight, and power dissipation of a microfabricated part are also critical for airborne or spaceborne adaptive optics applications.
