ABSTRACT
Nobody would deny the huge contribution of computers to current civilization. The computer is only a small box that can do complicated calculations and information processing within a short titne, but it is not a “magic box” or a “black box.” Sophisticated design of electrical circuits allows the computer to process information logically. In order to produce wiser and lighter computers, a large number of circuits are intended to be integrated in an incredibly small area by microfabrication techniques. The final goal of this approach is to develop an information-processing device having structural precision at atomic or molecular levels. In this regard, nanotechnology, which aims to establish nanometer-size fabrication, has rapidly attracted attention [1,2].
