ABSTRACT
This chapter explains the thermal-nanoimprinting process in terms of materials, molds, and equipment. The most important characteristic of thermoplastic resins for nanoimprinting is the glass transition temperature, which can be measured by a torque rheometer. In this measurement system, a thermoplastic sample is set between two flat plates, one of which is rotated by a small angle. The plate temperature is controllable. From an industrial viewpoint, roll-press nanoimprinting is attractive for mass production. The tact time is drastically reduced in roll pressing compared to parallel pressing because the heat capacity of the mold in roll pressing is smaller than that of the mold in parallel-press imprinting due to the small press area. However, the cooling time is quite short, so controlling the pattern fidelity is difficult. Practical fabrication of a film by thermal nanoimprinting is explained as follows in terms of examples of processes, materials, molds, and equipment.
