ABSTRACT
This chapter explores the electron-induced chemistry underlying focused electron beam–induced deposition (FEBID) processes and the approaches of state-of-theart work in this area. It proposes a basic knowledge of the technique itself, the physics behind the production of low-energy secondary electrons (SE) under the focused high-energy electron beam, and experiments unraveling the electron-driven chemistry leading to nanostructure formation. The chapter provides an introduction to FEBIP processes and its applications. It examines the fundamentals of electron scattering in solid materials, the resulting release of SEs, and its consequences in terms of spatial resolution of focused electron beam induced processing processes. The chapter describes reactive electron–precursor interactions and their implications on the surface reactions involved in FEBID processes as well the experimental approaches to obtain comprehensive insight into the fundamental chemistry behind FEBID. It concludes with a few examples from FEBID research and thus emphasizes that progress in this area strongly depends on the collaboration of different disciplines.
