ABSTRACT
We have measured plasma parameters and particle densities in the centre of rf discharges in Argon, Nitrogen and Chlorine with the help of laser induced fluorescence spectroscopy, double probes and ion mass spectrometry. The ion densities increase with increasing discharge power until a saturation value is approached. In contrast the ion densities as a function of pressure run through a maximum at 25–30 Pa. The ion energy distribution on the grounded wall and the powered electrode is calculated for Ar with the help of a theoretical model for the sheath.
