ABSTRACT
Utilizing of higher speed plasma flows of vacuum arc discharge permitted to obtain surface layers with high operation peculiarities. In many cases technological procedure includes such a process as interaction of vacuum arc discharge plasma and reaction gas with the formation of specially solid compounds of nitride and carbide metal types at the surface treated. The possibility of description of plasma particles energetic states with the use of temperatures are often absent, because the related distributions are differed from Maxwell and Boltzmann ones. For reducing of the electrons velocity distribution functions differentiation of probe volt-ampere characteristics was performed using the method of double numerical differentiation and modulation method of the second derivative. The measurements of electrical field strength in vacuum arc discharge plasma was carried out using the method of double probe according to the compensation scheme.
