ABSTRACT

Interfacial structures in the Bl-AlN/TiN(001) superlattices have been studied by the first-principle plane wave pseudopotential method based on density functional theory. The theoretical calculations show that the preferred bonding configuration across the interface is cation-anion bonding. It is proposed that the bond directionality and charge redistribution in the Bl-AlN/TiN(001) superlattice would play an important role in superlattices hardness.