ABSTRACT
For the last three decades, semiconductor memory has greatly advanced towards high density and high performance due to the tremendous progress of electronic data processing (EDP). More recently, with the advent of mobile era, power consumption has become an important aspect of memory applications. Of particular interest among the many key features for future applications are low power consumption, high speed, and high density that will be equally important or one/two of which will be dominantly important depending on applications. To understand the direction for future technology of semiconductor memory, the key technologies and design issues including critical technical barriers and corresponding solutions will be reviewed in terms of density (scalability), performance, and power consumption.
