ABSTRACT
Information technology (IT)—such as Internet, i-mode, cellular phone, and car navigation—has spread very rapidly all over of the world. IT is expected to dramatically raise the efficiency of our society and greatly improve the quality of our life. The actual scaling of the parameters has been different from that originally proposed as the ideal scaling. This chapter shows the past and future trends of the downsizing of MOSFET's parameters and Large-scale integration (LSI) chip properties mainly used for high performance Micro Processing Unit. In digital circuit applications, a MOSFET functions as a switch. In addition, small capacitances are required for the switch to rapidly turn on and off. The supply voltage was not reduced in the early phase of LSI generations in order to keep a compatibility with the supply voltage of conventional systems and also in order to obtain higher operation speed under higher electric field.
