ABSTRACT
A novel scheme for integrating tree-space micro-optical systems on a single chip has been demonstrated by surface-micromachining techniques. The free-space micro-optical bench (FSMOB) which contains monolithic three-dimensional micro-optical elements as well as active optoelectronic components with self-aligned hybrid integration. The optical axes of these optical elements are parallel to the substrate, which enables the entire free-space optical system to be integrated on a single substrate. Micro-Fresnel lenses, mirrors, beam-splitters, gratings, precision optical mounts, micro-positioners such as rotary stages and linear translational stages, as well as self-aligned semiconductor edge-emitting and surface-emitting lasers have been successfully fabricated and characterized.
