ABSTRACT
We studied the nonplanar growth-shape of AlGaInP by MOVPE, containing the (411)A-Iike inclined micro-facet on the stepped substrate. We found that the (411)A-like inclined micro-facet was stable in different growth conditions. We suggest that the micro-facets are an equilibrium form determined by factors such as surface energy, and that the growth shapes were determined by both the growth thickness distributions and the surface energy.
