ABSTRACT

A liquid-droplet target system for uninterrupted, high-repetition rate and practically debris-free laser-plasma soft x-ray generation is described. The system is based on the continuous liquid jet droplet generation method. With a table-top 70 mJ/pulse, 100 ps, λ=532 nm Nd:YAG laser the emission is up to ~3×1012 photons/(sr-pulse-spectral line) in the λ=1-5 nm region. It is found that a synthetic UV prepulse increases x-ray emission a factor 8. Typical applications are microscopy and lithography.