ABSTRACT
Optimized structures of multilayer soft x-ray reflectors have been numerically searched in the spectral range of 30 to 300 https://www.w3.org/1998/Math/MathML"> Å https://s3-euw1-ap-pe-df-pch-content-public-p.s3.eu-west-1.amazonaws.com/9781003063032/9284f42f-003f-4795-89cd-da73f9068931/content/ieq0106.tif" xmlns:xlink="https://www.w3.org/1999/xlink"/> . The dynamical theory of x-ray scattering has been employed in the calculation. The maximum reflectivities vary from 40 to 78 % in the spectral range.
