ABSTRACT
We have determined the spectral characteristics of two plane molybdenum-silicon multilayer laminar diffraction gratings, MoSil (2000 lines/mm) and MoSi2 (1000 lines/mm) using a laser-plasma broadband soft X-ray radiation source. The gratings with a multilayer structure period of 115 A were studied in the configuration of a quasi-stigmatic spectrograph with a moderate dispersion at near-normal incidence and at an angle of incidence of 36°. The spectral shape of the resonance reflection in the first and second Bragg orders of the multilayer structure was determined. Line spectra of the multiply charged ions F V - VI, Cl VII in the 160 - 230 https://www.w3.org/1998/Math/MathML"> Å https://s3-euw1-ap-pe-df-pch-content-public-p.s3.eu-west-1.amazonaws.com/9781003063032/9284f42f-003f-4795-89cd-da73f9068931/content/ieq0126.tif" xmlns:xlink="https://www.w3.org/1999/xlink"/> range were obtained with the use of the multilayer gratings, and their resolving power was inferred
