Pulsed laser deposition of multinary compound films

The deposition rate and composition of the amorphous deposit, produced at room temperature by pulsed laser ablation of ferroelectric Pb(Zr_0.65 Ti_0.35)O₃ (PZT), superconducting Bi₂Sr₂CuO₆ (BSCO) and a semiconductor CuInSe₂ (CIS), were studied experimentally with respect to ambient oxygen and/or argon pressure. The results are discussed considering the deposition process as a sorption of ablated species on the substrate surface and assuming the species retarding in a gas due to their collisions with gas molecules.