Demonstration of solid-state electron optical devices: Pixelated Fresnel Phase lenses

A demonstration of solid-state Pixelated Fresnel Phase (PFP) lenses for electrons will be presented. The PFP lens consists of a set of concentric zones of radially varying depths so that the lens, as a whole, brings an incoming electron plane wave to a spot in its focal plane. Each zone consists of an array of holes. Using the subnanometre electron beam of the VG HB501 STEM, the PFP lenses, both convex and concave types, were patterned in a thin evaporated AIF₃ film supported on an amorphous carbon film.