Surface characterisation of ultrathin Diamond-like Carbon coatings by low voltage SEM/EDX analysis

doi:10.1201/9781003063056-152

Chapter

Surface characterisation of ultrathin Diamond-like Carbon coatings by low voltage SEM/EDX analysis

ABSTRACT

The intensity of EDX peaks from substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.