ABSTRACT
In standing wave illumination, a specimen is illuminated by a fringe pattern created by the interference of two coherent plane waves. Objectives of this method are obtaining full elemental maps and full exit wave reconstruction. The measurement schemes can be realized by imaging a standing wave created by a beam splitter onto the specimen with a suitable optical system. Simulations of the first and third order optical properties show that the design of a three lens system for this purpose is possible.
