ABSTRACT
Quantitative Convergent Beam Electron Diffraction (QCBED) is used to determine selected structure factor amplitudes as well as three-phase structure invariants in non-centrosymmetric InP. The method used is based on center disk intensities only. Particular parameter sensitive pixels in the pattern are identified theoretically. With this selected area QCBED method, structure invariants can be determined with an accuracy of a few degrees and the structure factor amplitudes with an accuracy better than 0.5%.
