Probing local strain fields using electron diffraction in the scanning electron microscope

This paper describes two scanning electron microscope based electron diffraction methods: electron channelling contrast imaging (ECCI) and electron back scatter diffraction (EBSD). Both methods can be used to probe local strain fields in bulk materials at the microscopic scale. ECCI allows dislocations and their collective long range strain fields to be imaged and qualitatively characterised. EBSD patterns can be used to give a quantitative measurement of elastic strain.