ABSTRACT

Electron microscopy has had a glorious past: in this paper we glimpse into the future. We predict that the resolution in TEM and STEM will be 0.5Å, achieved using aberration correctors. EELS will have a spatial resolution of 1Å (for high energy losses) and an energy resolution of better than 0.1 eV, achieved using monochromators or a new type of electron source. EDX will have a spatial resolution of better than lnm (for high energy losses and thin specimens). STEM will be used for nanofabrication with atomic resolution. Future microscopes will have manual and automatic options, and be modular. Finally, the microscope of the future may sit on your desk.