ABSTRACT

We developed a ultrahigh vacuum high-resolution electron microscope equipped with a field-emission gun (UHV-FE-HR TEM) to study nano-particle surfaces. The ultra-high vacuum (2 × 10-8 Pa) allow us to keep clean surfaces on nano-particles. The microscope is equipped with a specially designed electron biprism for electron holography to measure a particle thickness, a high speed TV camera with a time resolution of 1 ms for dynamic observation, and a miniaturized STM which gives the spectroscopic information of a particle having a definite structure determined by high-resolution electron microscopy.