ABSTRACT
Monte Carlo method with “single scattering approximation” and “mixed element representation” is applied to estimate the effect of electron scattering, in gaseous and liquid water layer lying on the top of the specimen, on estimation of composition. This scheme of calculations is used to discuss two particular cases: (1) To see how a copper-carbon ‘step’ boundary would be resolved in the presence of a layer by imaging the emerging BSE distribution and (2) To obtain characteristic (Ca) x-ray emission profile of bone in the presence of a gas/liquid layer. The results show that although the resolution can remain sharp, the contribution of the emission comes from the region extending far beyond resolution.
