High pressure scanning electron microscopy (HPSEM): Conversion of an ordinary SEM to maintain pressures to 105 Pa

doi:10.1201/9781003063056-64

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High pressure scanning electron microscopy (HPSEM): Conversion of an ordinary SEM to maintain pressures to 105 Pa

ABSTRACT

The key function of a high pressure scanning electron microscope is to support an elevated pressure in the specimen chamber whilst maintaining the column of the microscope at high vacuum. Details are given of the conversion of a conventional SEM to enable operation at up to atmospheric pressure.