ABSTRACT
A fast Monte-Carlo model to simulate electron-solid interaction in small dimension raised and buried structures has been developed. Secondary, backscattered, Auger and low energy loss electrons and characteristic x-rays are collected. The model has been used to develop a new method of detection and correction of edge enhancement encountered in high resolution Auger imaging of topographical structures. Back-scattered electrons of energy >0.75Ep (Ep is the energy of the primary electron beam) are used to correct for Auger edge enhancement. Correction is applied to small structures, including a bevelled multi-layer sample where substrate enhancement occurs.
